Inspection system and method

Abstract

An inspection system comprises: a radiation source; a detector configured to detect a signal when radiation emitted by the radiation source acts on the inspected object; and a processor in communication connection with the radiation source and configured to determine at least one periodic radiation combination corresponding to a type of the object according to the type of the object, select periodic radiation combinations respectively corresponding to at least two different portions of the object in the at least one periodic radiation combination, and cause the radiation source to emit radiation to the at least two corresponding different portions in selected periodic radiation combinations during the time that the object is scanned, wherein a periodic radiation combination is a chronological arrangement of at least one radiation pulse output by the radiation source in each scanning period. An inspection method is also provided.

Dependencies are inferred from the claim text.