Method for manufacturing force sensor

A method for manufacturing a force sensor comprising:

• preparing a first substrate which is made of a material that transmits electromagnetic waves and includes on its surface a metal array arranged in a periodic pattern and a second substrate which includes on its surface a metal layer that reflects electromagnetic waves;
• forming a spacer member around the metal layer on the surface of the second substrate;
• forming a first metal layer thinner than the spacer member around the spacer member on the surface of the second substrate;
• forming a second metal layer thinner than the spacer member in a region corresponding to the first metal layer on the first substrate;
• and
• fusing the first metal layer and the second metal layer together to fix the spacer member formed on the surface of the second substrate in a state in which it abuts the surface of the first substrate.

A method for manufacturing a force sensor comprising:

• preparing a first substrate which is made of a material that transmits electromagnetic waves and includes on its surface a metal array arranged in a periodic pattern and a second substrate which includes on its surface a metal layer that reflects electromagnetic waves;
• forming a first spacer member around the metal array on the surface of the first substrate;
• forming a first metal layer around the first spacer member on the surface of the first substrate;
• forming a second spacer member in a region corresponding to the first spacer member and around the metal layer on the surface of the second substrate;
• forming a second metal layer on the surface of the second substrate in a region corresponding to the first metal layer and around the second spacer member;
• and
• fusing the first metal layer and the second metal layer together to fix the first substrate and the second substrate in a state in which the first spacer member formed on the surface of the first substrate abuts the second spacer member formed on the surface of the second substrate.