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AssigneeMitsubishi Electric Research Laboratories, Inc.
InventorsJoshua Rapp, Hassan Mansour, Petros Boufounos, Toshiaki Koike Akino, Kieran Parsons
Estimating the term…
An optical coherence tomography (OCT) system comprises an interferometer configured to interfere a test beam reflected from a specimen with a reference beam to produce an interference pattern. The OCT system also comprises a spectrometer configured to measure a spectrum of the interference pattern to produce measurements of intensities of the interference pattern corresponding to different wavelengths. The OCT system further comprises a processor configured to determine noise statistics of the intensities of the interference pattern and use the noise statistics to set a threshold for detecting a number of layers of the specimen penetrated by the test beam at the location based on a pre-specified probability of false acceptance of noise as a signal. The processor is further configured to determine the profilometry measurements as an estimate of depths of the layers of the specimen causing the intensities of the interference pattern above the threshold.
An optical coherence tomography (OCT) system for profilometry measurements of a specimen, comprising:
A method for profilometry measurements of a specimen in an optical coherence tomography (OCT) system, the method comprising:
A non-transitory computer readable medium having stored thereon computer-executable instructions which when executed by a computer, causes the computer to perform a method for profilometry measurements of a specimen in an optical coherence tomography (OCT) system, the method comprising:
Dependencies are inferred from the claim text.