Actuator, open/close valve mechanism, and fluid control device

An open/close valve mechanism, the mechanism comprising:

• an actuator, the actuator comprising:
• a casing having an inlet hole formed at one end through which a driving fluid is introduced from an outside the casing;
• a shaft body arranged inside the casing along the axial direction of the casing, formed with an elongated hole that opens in the same direction as the inlet hole and runs along the axial direction, and multiple exhaust holes that communicate with the elongated holes and are arranged at set intervals along the axial direction, and introducing the driving fluid introduced from the inlet through the opening of the elongated hole and discharging the driving fluid from the multiple exhaust holes;
• a partition body includes a disk body having a first through hole formed in the center, and an outer cylindrical body standing on the periphery of the disk body and abutting against the inner peripheral surface of the casing;
• multiple assemblies consist of a piston body having a rod-shaped cylindrical body that is inserted into the first through hole and has a second through hole formed in the center, and are arranged at multiple positions inside the casing corresponding to the multiple exhaust holes;
• and,
• a biasing body disposed within the casing,
• wherein:
• each partition body in the multiple assemblies abuts against the adjacent partition body in the axial direction at the end surface of the outer cylindrical body and the disk body, and each piston body abuts against the adjacent piston body in the axial direction at the rod-shaped cylindrical body;
• each piston body has the shaft body passing through the second through hole so that the shaft body can abut against the piston body, and together with each partition body, forms a closed space communicating with each exhaust hole at each position of the multiple exhaust holes;
• one of the piston bodies located on the most one end side or the most other end side is connected to the shaft body;
• and,
• the biasing body biases the piston body connected to the shaft body in a direction against the pressure of the driving fluid.

A fluid control device, the fluid control device comprising:

• an open/close valve mechanism, the mechanism comprising:
• an actuator, the actuator comprising:
• a casing having an inlet hole formed at one end through which a driving fluid is introduced from outside the outside;
• a shaft body arranged inside the casing along the axial direction of the casing, formed with an elongated hole that opens in the same direction as the inlet hole and runs along the axial direction, and multiple exhaust holes that communicate with the elongated holes and are arranged at set intervals along the axial direction, and introducing the driving fluid introduced from the inlet through the opening of the elongated hole and discharging the driving fluid from the multiple exhaust holes;
• a partition body includes a disk body having a first through hole formed in the center, and an outer cylindrical body standing on the periphery of the disk body and abutting against the inner peripheral surface of the casing;
• multiple assemblies consist of a piston body having a rod-shaped cylindrical body that is inserted into the first through hole and has a second through hole formed in the center, and are arranged at multiple positions inside the casing corresponding to the multiple exhaust holes;
• and,
• a biasing body disposed within the casing,
• wherein:
• each partition body in the multiple assemblies abuts against the adjacent partition body in the axial direction at the end surface of the outer cylindrical body and the disk body, and each piston body abuts against the adjacent piston body in the axial direction at the rod-shaped cylindrical body;
• each piston body has the shaft body passing through the second through hole so that the shaft body can abut against the piston body, and together with each partition body, forms a closed space communicating with each exhaust hole at each position of the multiple exhaust holes;
• one of the piston bodies located on the most one end side or the most other end side is connected to the shaft body;
• and,
• the biasing body biases the piston body connected to the shaft body in a direction against the pressure of the driving fluid;
• and
• a bellows structure connected to the connecting portion.