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US 12,663,029 B2Granted
Gas transport system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJheng-Syun Li, Mao-Chou Huang
Life of this patent
Estimating the term…
Abstract
A conduit system for transporting gas from a gas containing chamber for processing a substrate from which semiconductor devices are formed includes a liner with a spiral vent. The conduit system utilizes a curtain of gas to prevent or reduce deposition of material onto an inner surface of the conduit transporting the gas from the gas containing chamber.
Claims20
A gas curtain device comprising:
- a conduit liner, the conduit liner including a spiral vent passing though the conduit liner, wherein a pitch between adjacent spiral vents along a length of the conduit liner is variable;
- and
- a conduit joint surrounding a portion of the conduit liner, the conduit joint including a plurality of gas inlet ports in fluid communication with the spiral vent of the conduit liner, wherein an internal surface of the conduit joint includes a beveled surface.
A method for transporting a gas, comprising:
- flowing, through an exhaust conduit, an exhaust gas from a gas containing chamber for processing a substrate;
- flowing a purge gas into one of a plurality of gas inlet ports of an exhaust conduit joint, wherein an internal surface of the conduit joint includes a beveled surface;
- flowing the purge gas through a spiral vent in an exhaust conduit liner within the exhaust gas conduit;
- and
- creating a curtain of purge gas along an internal surface of the exhaust conduit liner,
- wherein a pitch between adjacent spiral vents along a length of the conduit liner is variable.
3 more elements
A conduit system for transporting a gas comprising:
- a conduit in fluid communication with a processing chamber for a semiconductor substrate;
- a conduit liner within the conduit, the conduit liner including a spiral vent, the width of the spiral vent being variable along the length of the conduit liner;
- a conduit joint surrounding a portion of the conduit liner and surrounding a portion of the conduit, the conduit joint including a plurality of gas inlet ports, the gas inlet ports in fluid communication with an interior of the conduit;
- a conduit finger extending from an exterior of the conduit liner, the conduit finger contacting the conduit;
- and
- a seal between the conduit and the conduit joint.
3 more elements
Dependencies are inferred from the claim text.