Polishing pad, pyrolysis oil obtained therefrom, and process for preparing the same
AssigneeEnpulse Co., Ltd.
InventorsChang Gyu Im, Jangwon Seo
Life of this patent
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Abstract
The embodiment relates to a polishing pad that comprises a polishing layer. When pyrolysis oil obtained from the polishing pad is analyzed according to the KS M 2457 standard, the content of chlorine components is 13,000 mg/kg or more. The pyrolysis oil can be used as a high-quality heat source through a refining process. Accordingly, the embodiment can contribute to improving environmental problems while increasing the recycling rate of polishing pads.
Claims11
A polishing pad, which comprises a polishing layer, wherein, when pyrolysis oil obtained by pyrolyzing the polishing pad at 320° C. for 6 hours is analyzed according to the KS M 2457 standard, the content of chlorine components is 13,000 mg/kg to 16,000 mg/kg.
Pyrolysis oil, which is obtained from a polishing pad, wherein, when the pyrolysis oil is analyzed according to the KS M 2457 standard, the content of chlorine components is 13,000 mg/kg to 16,000 mg/kg.
A process for preparing pyrolysis oil, which comprises:
- charging a polishing pad into a chamber;
- pyrolyzing the polishing pad charged into the chamber at 280 to 350° C.;
- and
- passing the vaporized stream formed by the pyrolysis through a heat exchanger to obtain liquid pyrolysis oil,
- wherein, when the pyrolysis oil is analyzed according to the KS M 2457 standard, the content of chlorine components is 13,000 mg/kg to 16,000 mg/kg.
Dependencies are inferred from the claim text.