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US 12,662,559 B2Granted
Curable composition for imprinting, cured substance, imprint pattern producing method, and method for manufacturing device
AssigneeFUJIFILM Corporation
InventorsNaoya Shimoju, Akinori Shibuya
Life of this patent
Estimating the term…
Abstract
Provided are a curable composition for imprinting, which contains a polymerizable compound and a polymerization initiator, in which one of components contained in the composition is a compound which includes a 5-membered ring structure having two or more heteroatoms as ring members; a cured substance of the curable composition for imprinting; an imprint pattern producing method using the curable composition for imprinting; and a method for manufacturing a device, which includes the imprint pattern producing method.
Claims12
A curable composition for imprinting, comprising:
- a polymerizable compound;
- and
- a polymerization initiator,
- wherein one of components contained in the composition is a compound which includes a 5-membered ring structure having two or more heteroatoms as ring members, said compound being represented by Formula (1),
- in Formula (1), X1 to X4 each independently represent O, S, or NRN, RN represents a hydrogen atom or an organic group, and R1 and R2 each independently represent a hydrogen atom or an organic group, where R1 and R2 may be bonded to each other to form a ring.
2 more elements
Dependencies are inferred from the claim text.