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US 12,662,495 B2Granted
Silicon precursor compound, composition for forming silicon-containing film including the same, and method of forming silicon-containing film
AssigneeUp Chemical Co., Ltd.
InventorsJin Sik Kim, Byung Kwan Kim, Jun Hwan Choi, Da Som Yu
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Abstract
The present disclosure relates to a silicon precursor compound, a method of preparing the silicon precursor compound, a silicon-containing film-forming precursor composition including the silicon precursor compound, and a method of forming a silicon-containing film using the precursor compound.
Claims16
A silicon precursor compound, represented by the following Chemical Formula 1:
- R1R2N—SiH2—N(SiR3R4R5)2;
- [Chemical Formula 1]
- wherein, in the above Chemical Formula 1,
- —NR1R2 includes pyrrolidine group, piperidine group, 2,6-dimethylpiperidine group, 4-methylpiperazine group or morpholine group;
- R3 is hydrogen, methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, iso-butyl group, sec-butyl group, or tert-butyl group;
- and
- each of R4 and R5 is independently methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, iso-butyl group, sec-butyl group, or tert-butyl group.
4 more elements
A method of forming a silicon-containing film, comprising:
- forming a silicon-containing film using a film-forming precursor composition including a silicon precursor compound represented by the following Chemical Formula 1:
- R1R2N—SiH2—N(SiR3R4R5)2;
- [Chemical Formula 1]
- wherein, in the above Chemical Formula 1:
- —NR1R2 includes pyrrolidine group, piperidine group, 2,6-dimethylpiperidine group, 4-methylpiperazine group, or morpholine group;
- R3 is hydrogen, methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, iso-butyl group, sec-butyl group, or tert-butyl group;
- and
- each of R4 and R5 is independently methyl group, ethyl group, n-propyl group, iso-propyl group, n-butyl group, iso-butyl group, sec-butyl group, or tert-butyl group.
5 more elements
Dependencies are inferred from the claim text.