Microelectromechanical device and microelectromechanical loudspeaker
AssigneeRobert Bosch GmbH
InventorsAnton Melnikov, Jens Schindele
Life of this patent
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Abstract
A microelectromechanical device for generating a fluid pressure. The microelectromechanical device includes a displacement structure, wherein the displacement structure has a movable membrane which can be deflected to generate the fluid pressure by means of a drivable connection structure acting on the membrane, and wherein the connection structure has a drive element and a deflection element connecting the membrane to the drive element. The deflection element has a lower flexural rigidity than the drive element and is elastically deformable when the membrane is deflected. A microelectromechanical loudspeaker having such a microelectromechanical device is also described.
Claims15
A microelectromechanical device for generating a fluid pressure, comprising:
- a displacement structure, the displacement structure including a movable membrane which can be deflected to generate the fluid pressure via a drivable connection structure acting on the membrane, and wherein the connection structure includes a drive element and a deflection element connecting the membrane to the drive element, wherein the deflection element has a lower flexural rigidity than the drive element and is elastically deformable when the membrane is deflected.
A microelectromechanical loudspeaker, comprising:
- a microelectromechanical device for generating a fluid pressure, including:
- a displacement structure, the displacement structure including a movable membrane which can be deflected to generate the fluid pressure via a drivable connection structure acting on the membrane, and wherein the connection structure includes a drive element and a deflection element connecting the membrane to the drive element, wherein the deflection element has a lower flexural rigidity than the drive element and is elastically deformable when the membrane is deflected, wherein the displacement structure is configured to generate sound pressure as the fluid pressure;
- and
- a signal processing unit configured to apply and process signals from the microelectromechanical device.
Dependencies are inferred from the claim text.