Laminated substrate, liquid ejection head, and method of manufacturing laminated substrate
AssigneeCanon Kabushiki Kaisha
InventorAtsunori Terasaki
Life of this patent
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Abstract
An object is to provide a laminated substrate, a liquid ejection head, and a method of manufacturing a laminated substrate which are capable of preventing a decrease in the yield of a manufacturing process due to the substrate getting broken and an organic resin material sticking out. To that end, a structure including an eave portion having an overhang with a predetermined length is provided on a predetermined surface of a first substrate so as to form a space between the structure and the predetermined surface, and a resin is filled in the space.
Claims11
A laminated substrate comprising:
- a first substrate having a predetermined surface;
- a structure including an eave portion having an overhang with a predetermined length provided on the predetermined surface so as to form a space between the structure and the predetermined surface;
- a resin provided on a side of the structure opposite to the first substrate;
- and
- a second substrate bonded to the first substrate by the resin via the structure,
- wherein the resin is filled in at least part of the space.
A laminated substrate comprising:
- a first substrate having a predetermined surface;
- a structure provided on the predetermined surface;
- a resin provided on a side of the structure opposite to the first substrate;
- and
- a second substrate bonded to the first substrate by the resin via the structure,
- wherein the structure includes a holding portion to hold the resin with a capillary force,
- wherein the resin is filled in at least part of the holding portion.
A liquid ejection head comprising:
- a first substrate on which part of a channel is formed, the first substrate having a predetermined surface;
- a structure including an eave portion having an overhang with a predetermined length provided on the predetermined surface so as to form a space between the structure and the predetermined surface;
- a resin provided on a side of the structure opposite to the first substrate;
- and
- a second substrate bonded to the first substrate by the resin via the structure, wherein the resin is filled in at least part of the space.
A method of manufacturing a laminated substrate comprising:
- preparing a first substrate having a predetermined surface;
- providing a structure including an eave portion having an overhang with a predetermined length on the predetermined surface so as to form a space between the structure and the predetermined surface;
- providing a resin on a side of the structure opposite to the first substrate;
- and
- bonding the first substrate and a second substrate by the resin via the structure,
- wherein the step of providing the resin comprises filling the resin in at least part of the space.
Dependencies are inferred from the claim text.