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US 12,661,695 B2Granted
Particle removal system and method for controlling particle removal system
AssigneesKawasaki Jukobyo Kabushiki Kaisha, Kawasaki Robotics (USA), Inc.
InventorsHaruhiko Tan, Ryan Le, Theodore Philliber, Simon Jeyapalan, Nobuyasu Shimomura, Avish Ashok Bharwani
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Abstract
A particle removal system according to this disclosure includes a particle absorption tool configured to absorb particles, and a robot. The robot is configured to perform absorption operation that includes at least one of moving the particle absorption tool and pressing the particle absorption tool down in the target area in a target area for absorption of particles during the absorption of particles.
Claims12
A particle removal system comprising:
- an electrostatic particle absorption tool configured to be electrostatically charged in order to absorb particles;
- a receiving part to receive a substrate;
- and
- a robot configured to perform absorption operation that includes at least one of moving the particle absorption tool and pressing the particle absorption tool in a target area for absorption of particles during the absorption of particles, wherein
- the robot includes a hand configured to hold the substrate and the particle absorption tool and place the substrate in the receiving part, and
- the hand is configured to repeatedly reposition the particle absorption tool to change a position of the particle absorption tool by repeatedly moving the particle absorption tool in a horizontal plane of the receiving part.
3 more elements
Dependencies are inferred from the claim text.