Liquid processing apparatus and liquid processing method

A liquid processing apparatus comprising:

• a storage tank that stores a processing liquid;
• a first circulation line configured to cause the processing liquid sent from the storage tank to pass through a first filter and to return to the storage tank;
• and
• at least one second circulation line connected to the first circulation line such that the processing liquid sent from the storage tank also passes through a second filter while passing through the first filter, and the processing liquid passing through the second filter directly returns to the storage tank,
• wherein the at least one second circulation line is shorter in a flow path than the first circulation line,
• a second flow rate of the processing liquid flowing into the at least one second circulation line is smaller than a first flow rate of the processing liquid flowing into the first circulation line at a downstream side of a junction location where the first circulation line and the at least one second circulation line are joined, and
• the second filter is smaller in a filtration amount per unit time than the first filter.