Bubbler for use in semiconductor manufacturing process

A chemical supply device for use in a semiconductor manufacturing process, the chemical supply device comprising a bubbler,

• wherein the bubbler comprises:
• a lower support surface comprising a lower concave portion formed to be concave inward the bubbler;
• a side surface smoothly connected to the lower support surface through a corner curved portion;
• an upper surface extended from the side surface;
• an inlet extended from an outside of the upper surface to an inside of the bubbler, and configured to inject an output gas for causing a chemical solution contained in the bubbler to evaporate;
• and
• an outlet configured to transmit the chemical salutation evaporated in the bubbler,
• wherein the lower concave portion has a radius of center curvature that is greater than or equal to 28% of a diameter of the lower support surface and is less than 48% of the diameter of the lower support surface in order to increase a flow velocity of the output gas sprayed from the inlet,
• wherein the inlet is disposed to have a predetermined angle with respect to the lower support surface to increase the flow velocity of the output gas, and
• wherein the predetermined angle is 60° to 80° inclusive.