ASC process automation device

An ASC process automation apparatus comprising:

• a loading unit configured to allow an ingot subjected to wire sawing to be loaded thereon;
• a kerosene cleaning unit configured to clean the ingot using kerosene;
• a pre-cleaning unit configured to pre-clean the ingot cleaned by the kerosene cleaning unit, thereby primarily removing the kerosene from the ingot;
• a main cleaning unit configured to clean the ingot multiple times;
• a wafer separation unit configured to split the ingot into a plurality of wafers;
• a conveying unit configured to convey the ingot linearly and move the ingot upwards and downwards while passing by the kerosene cleaning unit, the pre-cleaning unit, the main cleaning unit, and the wafer separation unit;
• and
• a rail unit mounted along the kerosene cleaning unit, the pre-cleaning unit, the main cleaning unit, and the wafer separation unit, wherein the conveying unit is mounted to the rail unit,
• wherein the conveying unit comprises:
• a clamping unit configured to clamp the ingot;
• a linear conveying unit mounted so as to be linearly movable along the rail unit;
• and
• an upward/downward conveying unit configured to move the clamping unit upwards and downwards,
• wherein the clamping unit comprises a clamp configured to selectively hold or release two opposite points on an outer circumference of the ingot,
• wherein the linear conveying unit comprises a first motor and a wheel movably mounted to the rail and configured to be rotated by the first motor,
• wherein the upward/downward conveying unit comprises a second motor and a wire coupled to the clamping unit and configured to be adjusted in length by the second motor,
• wherein the longitudinal direction of the ingot is parallel to the y-axis direction and the clamp selectively hold or release the front and rear points of the ingot in the x-axis direction which is perpendicular to the y-axis,
• wherein the kerosene cleaning unit comprises a plurality of kerosene baths, and the ingot is sequentially immersed into the plurality of kerosene baths by the linear conveying unit,
• wherein the kerosene stored in each respective kerosene baths has a different concentration,
• wherein the pre-cleaning unit comprises a pre-cleaning tank and a spray nozzle configured to spray a cleaning liquid to the ingot introduced into the pre-cleaning tank by the conveying unit, and
• wherein the spray nozzle is mounted in the pre-cleaning tank so as to be movable upwards and downwards in order to spray the cleaning liquid toward the opposite side surface of the ingot.