Microparticle arraying mask
AssigneeDexerials Corporation
InventorsAkihiro Shibata, Masahiro Nishimoto, Yusuke Tanaka, Hirokazu Odagiri, Katsuhiro Doi
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AssigneeDexerials Corporation
InventorsAkihiro Shibata, Masahiro Nishimoto, Yusuke Tanaka, Hirokazu Odagiri, Katsuhiro Doi
Estimating the term…
To prevent defects in microparticles from occurring in a case of arraying the microparticles having a diameter of less than or equal to 50 μm on a base material. Provided is a microparticle arraying mask for arraying microparticles having a diameter of less than or equal to 50 μm on a base material. The microparticle arraying mask has through-holes into which the microparticles are inserted. An opening plane of the through-holes on a microparticle supply side has an area smaller than an area of an opening plane of the through-holes on a microparticle discharge side. In a case of assuming that a direction from the opening plane on the microparticle supply side to the opening plane on the microparticle discharge side is a positive direction of a z-axis, and a sectional area of the through-holes vertical to the z-axis is A, dA(z)/dz>0 holds in a whole region in the through-holes along the z-axis, and Expression (1) below is satisfied: 0.4≤t/d≤1.0 (1).
A microparticle arraying mask for arraying microparticles having a diameter of less than or equal to 50 μm on a base material, wherein
An apparatus comprising a microparticle arraying mask for arraying microparticles on a base material, and the microparticles, wherein
Dependencies are inferred from the claim text.