Vibration element and method of manufacturing vibration element
AssigneeSeiko Epson Corporation
InventorsTakuro Kobayashi, Keiichi Yamaguchi, Ryuta Nishizawa
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AssigneeSeiko Epson Corporation
InventorsTakuro Kobayashi, Keiichi Yamaguchi, Ryuta Nishizawa
Estimating the term…
A vibration element includes a vibrating part, and a support part which is coupled to the vibrating part to support the vibrating part, wherein the vibrating part and the support part have a first surface and a second surface having a front and back relationship with the first surface, a first electrode is disposed on the first surface, the first electrode includes a first layer as a foundation layer, and a second layer as an upper layer of the first layer, when performing zoning into a first area where the first electrode is not disposed, a second area where the first layer and the second layer are stacked on one another, and a third area where the first layer is formed, identification symbols formed of two or more of the first to third areas are disposed, and an identification code formed of a plurality of the identification symbols is provided.
A vibration element comprising:
Dependencies are inferred from the claim text.