Resonator device and method of manufacturing resonator device
AssigneeSeiko Epson Corporation
InventorsMasahiro Fujii, Ryuichi Kurosawa
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Abstract
A resonator device includes a base made of silicon and provided with a first surface and a second surface in a front-back relationship with each other, a resonator element arranged on the first surface, a lid which is made of silicon, which has a third surface arranged at the first surface side to be faced to the first surface, and a recessed part having a bottom surface and opening on the third surface, and the third surface of which is bonded to the first surface, and a getter layer which is arranged on the bottom surface of the recessed part, and which is provided with a gas adsorptive property, wherein the bottom surface of the recessed part is higher in surface roughness Ra than the third surface.
Claims14
A resonator device comprising:
- a base made of silicon and provided with a first surface and a second surface in a front-back relationship with each other;
- a resonator element arranged on the first surface;
- a lid which is made of silicon, which has a third surface arranged at the first surface side to be faced to the first surface, and a recessed part having a bottom surface and opening on the third surface, and the third surface of which is bonded to the first surface;
- and
- a getter layer which is arranged on the bottom surface of the recessed part, and which is provided with a gas adsorptive property, wherein
- the bottom surface of the recessed part is higher in surface roughness Ra than the third surface.
A method of manufacturing a resonator device having a base made of silicon and provided with a first surface and a second surface in a front-back relationship with each other, a resonator element arranged on the first surface, a lid which is made of silicon, which has a third surface arranged at the first surface side to be faced to the first surface, and a recessed part having a bottom surface and opening on the third surface, and the third surface of which is bonded to the first surface, and a getter layer which is arranged on the bottom surface of the recessed part, and which is provided with a gas adsorptive property, the method comprising:
- a recessed part formation step of forming the recessed part provided with the bottom surface higher in surface roughness Ra than the third surface;
- a getter layer formation step of forming the getter layer on the bottom surface of the recessed part;
- and
- a bonding step of bonding the third surface of the lid to the first surface of the base.
Dependencies are inferred from the claim text.