Acoustic wave device with tilted interdigital transducer electrode
AssigneeSkyworks Solutions, Inc.
InventorsYuya Hiramatsu, Gong Bin Tang
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Abstract
Acoustic wave device is disclosed. the acoustic wave device can include a piezoelectric layer and an interdigital transducer electrode over the piezoelectric layer. The interdigital transducer electrode has a non-zero tilt angle. The non-zero tilt angle can between 5° to 15°. A thickness of the interdigital transducer electrode is at least 40% of a thickness of the piezoelectric layer, 400 nm, or 0.08λ where λ is the wavelength generated by the acoustic wave device.
Claims20
An acoustic wave device configured to generate a surface acoustic wave having a wavelength λ, the acoustic wave device comprising:
- a piezoelectric layer;
- a first reflector on the piezoelectric layer;
- a second reflector on the piezoelectric layer;
- and
- an interdigital transducer electrode over the piezoelectric layer and positioned between the first reflector and the second reflector, the interdigital transducer electrode having a tilt angle, the tilt angle being between 5° to 15°, a thickness of the interdigital transducer electrode being at least 0.08λ.
An acoustic wave device comprising:
- a lithium tantalate piezoelectric layer;
- and
- a single layer aluminum interdigital transducer electrode over the lithium tantalate piezoelectric layer, the single layer aluminum interdigital transducer electrode having a tilt angle, the tilt angle being between 5° to 15°, a thickness of the single layer aluminum interdigital transducer electrode being at least 400 nm.
An acoustic wave device comprising:
- a piezoelectric layer;
- and
- an interdigital transducer electrode over the piezoelectric layer, the interdigital transducer electrode having a tilt angle, the tilt angle being non-zero, a thickness of the interdigital transducer electrode being at least 40% of a thickness of the piezoelectric layer.
Dependencies are inferred from the claim text.