High speed spatial light modulator

Abstract

A high speed spatial light modulators are described. In one non-limiting example, an optical phased array structure comprises a vertical cavity surface-emitting laser (VCSEL) that provides a light beam and a phase delay unit that includes a bi-layer photonic crystal slab. The bi-layer photonic crystal slab (PCS) is attached to the VCSEL and comprises two silicon PCS layers separated by a dielectric layer. The optical phased array structure is configured to control a direction of the light beam by a voltage applied to the phase delay unit. By incorporating a dispersive layer (e.g. graphene), the absorption of the structure can be modulated and accordingly the reflection of the surface can be modulated as well.

Dependencies are inferred from the claim text.