MEMS switch for RF applications

A microelectromechanical systems (MEMS) switch device, comprising:

• first, second and third electrodes, wherein a first signal path is disposed between the first and second electrodes and a second signal path is disposed, separately from the first signal path, between the first and third electrodes;
• a first MEMS switch electrically coupled between the first and second electrodes and forming a portion of the first signal path when the first MEMS switch is closed;
• a second MEMS switch electrically coupled between the first and third electrodes and forming a portion of the second signal path when the second MEMS switch is closed;
• and
• a first shunt switch electrically coupled between the third electrode and a reference potential.

A microelectromechanical systems (MEMS) switch device, comprising:

• first, second and third electrodes, wherein a first signal path is disposed between the first and second electrodes and a second signal path is disposed between the first and third electrodes;
• a first MEMS switch electrically coupled between the first and second electrodes and forming a portion of the first signal path when the first MEMS switch is closed;
• a second MEMS switch electrically coupled between the first and third electrodes and forming a portion of the second signal path when the second MEMS switch is closed;
• a first shunt switch electrically coupled between the third electrode and a reference potential;
• and
• an inductor/capacitor (LC) circuit coupled between the third electrode and the reference potential.

A method for operating a microelectromechanical systems (MEMS) switch device comprising a first MEMS switch coupling a first electrode to a second electrode, a second MEMS switch coupling the first electrode to a third electrode, and a first shunt switch coupling the third electrode to a reference potential, the method comprising:

• forming a first signal path between the first electrode and the second electrode by closing the first MEMS switch, wherein the first MEMS switch is a first teeter-totter switch comprising a mid-beam anchor;
• concomitantly with closing the first MEMS switch, forming a first shunt path between the third electrode and the reference potential by closing the first shunt switch;
• and
• concomitantly with closing the first MEMS switch, interrupting a second signal path between the first electrode and the third electrode by opening the second MEMS switch.