Trench capacitor with reduced mechanical stress
AssigneeMelexis Technologies SA
InventorsAppo Van Der Wiel, Thomas Freitag
Life of this patent
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Abstract
A trench capacitor includes a plurality of unit trench capacitors arranged in a 2D repetitive pattern in a substrate. The unit trench capacitors are separated by elongated trenches or elongated walls between the unit trench capacitors. The trench capacitor includes a plurality of stress compensation elements. Each unit trench capacitor has one or more closed trenches, with each trench further having a bottom electrode, a top electrode, and a dielectric between the bottom electrode and the top electrode. The unit trench capacitors are connected in parallel and the stress compensation elements are arranged between the unit trench capacitors such that they interrupt the elongated walls or trenches.
Claims13
A trench capacitor comprising a plurality of unit trench capacitors arranged in a 2D repetitive pattern in a substrate such that the unit trench capacitors are separated by elongated trenches or elongated walls between the unit trench capacitors, and comprising a plurality of stress compensation elements, wherein each unit trench capacitor comprises one or more trenches with a closed circumference, each trench further comprising a bottom electrode, a top electrode, and a dielectric between the bottom electrode and the top electrode,
- wherein the unit trench capacitors are connected in parallel, and wherein the stress compensation elements are trench capacitors comprising a trench with a closed circumference and are arranged between the unit trench capacitors on crossings of the elongated walls or elongated trenches, and wherein the stress compensation trench capacitors have, in a plane parallel to a surface of the substrate, a smaller enclosed area than the unit trench capacitors.
A method for making a trench capacitor, the method comprising:
- providing a substrate,
- making a plurality of unit trench capacitors, wherein each unit trench capacitor comprises one or more trenches with a closed circumference, each trench further comprising a bottom electrode, a top electrode, and a dielectric between the bottom electrode and the top electrode, and wherein the unit trench capacitors are arranged in a 2D repetitive pattern in the substrate such that the unit trench capacitors are separated by elongated trenches or elongated walls between the unit trench capacitors, and making stress compensation elements between the unit trench capacitors such that they are trench capacitors comprising a trench with a closed circumference and such that they are on crossings of the elongated walls or elongated trenches, and such that the stress compensation trench capacitors have, in a plane parallel to a surface of the substrate, a smaller enclosed area than the unit trench capacitors, and
- connecting the unit trench capacitors in parallel.
Dependencies are inferred from the claim text.