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US 12,656,697 B2Granted
Module vessel with scrubber gutters sized to prevent overflow
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChun-Kai Chang, Yu Sheng Chiang, Yu De Liou, Chi Yang, Ching-Juinn Huang, Po-Chung Cheng
Life of this patent
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Abstract
An extreme ultraviolet (EUV) source includes a module vessel and a scrubber system. The scrubber system may include a plurality of gutters in the module vessel. The plurality of gutters may include a first gutter and a second gutter. The second gutter may be lower than the first gutter in the module vessel. A unit volume of the second gutter is larger than a unit volume of the first gutter.
Claims20
A scrubber system, comprising:
- a plurality of gutters comprising:
- a first gutter comprising a first drain hole, and
- a second gutter comprising a second drain hole,
- wherein the second gutter is lower than the first gutter in the scrubber system, and
- wherein the second drain hole is larger than the first drain hole.
2 more elements
A scrubber system, comprising:
- a first gutter associated with draining a liquid and comprising a first drain hole;
- and
- a second gutter associated with draining the liquid and comprising a second drain hole,
- wherein the second gutter is connected to the first gutter to permit the second gutter to receive a portion of the liquid collected in the first gutter,
- wherein a cross-sectional area of the first gutter is smaller than a cross-sectional area of the second gutter, and
- wherein the second drain hole is larger than the first drain hole.
3 more elements
A scrubber system, comprising:
- a plurality of gutters comprising a first gutter, a second gutter that is lower than the first gutter, and a third gutter that is lower than the second gutter,
- wherein the first gutter comprises a first drain hole, and the second gutter comprises a second drain hole,
- wherein a cross-sectional area of the second gutter is larger than a cross-sectional area of the first gutter, and
- wherein a cross-sectional area of the third gutter is larger than the cross-sectional area of the second gutter;
- and
- a plurality of vane layers comprising:
- a first vane layer between the first gutter and the second gutter, and a second vane layer between the second gutter and the third gutter.
4 more elements
Dependencies are inferred from the claim text.