Electric component box and extreme ultraviolet light generation apparatus
AssigneeGigaphoton Inc.
InventorKen Yamada
Life of this patent
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AssigneeGigaphoton Inc.
InventorKen Yamada
Estimating the term…
An electric component box includes a first box into which a wiring from the extreme ultraviolet light generation chamber device is introduced and capable of being fixed to a placement surface; a second box into which a wiring from the first box is introduced and capable of being switched, by being raised and lowered, between a fixed state and a movable state; and a connection device providing connection as allowing the second box to be rotatable with respect to the first box, from a facing state in which a predetermined side wall of the first box and a predetermined side wall of the second box face each other, in a direction in which the predetermined side wall of the first box and the predetermined side wall of the second box move away from each other, and to be capable of being raised and lowered with respect to the first box.
An electric component box for accommodating an electric component to be connected to an electric component of an extreme ultraviolet light generation chamber device,
An extreme ultraviolet light generation apparatus comprising:
Dependencies are inferred from the claim text.