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US 12,656,679 B2Granted
Compounds and photoresist compositions including the same
AssigneeDupont Electronic Materials International, LLC
InventorsLi Cui, Emad Aqad, Yinjie Cen, Conner A. Hoelzel, James F. Cameron, Jong Keun Park, Suzanne M. Coley, Choong-Bong Lee
Life of this patent
Estimating the term…
Abstract
A compound represented by Formula (1): wherein X is a group having a valency of r; each R1 is independently an organic group comprising an acid-labile group; m is an integer greater than or equal to 1; k is an integer from 1 to 5; and r is an integer from 2 to 10, wherein the compound is non-polymeric, and wherein Ar1, L1, L2, R2, and R3 are as defined herein.
Claims20
A compound, represented by Formula (1):
- wherein,
- X is represented by one of Formulae (4) to (9):
- wherein, in Formulae (4) to (9),
- Ar2, Ar3, and Ar5 are each independently substituted or unsubstituted C6-30 arylene or substituted or unsubstituted C3-30 heteroarylene;
- wherein Ar2 in Formula (4) is monocyclic;
- Ar4 is substituted or unsubstituted C6-30 aryl or substituted or unsubstituted C3-30 heteroaryl;
- R10 and R11 are each independently hydrogen, substituted or unsubstituted C1-30 alkyl, substituted or unsubstituted C3-30 cycloalkyl, substituted or unsubstituted C1-30 heterocycloalkyl, substituted or unsubstituted C6-30 aryl, substituted or unsubstituted C7-30 arylalkyl, substituted or unsubstituted C7-30 alkylaryl, substituted or unsubstituted C6-30 aryloxy, substituted or unsubstituted C3-30 heteroaryl, substituted or unsubstituted C4-30 alkylheteroaryl, substituted or unsubstituted C4-30 heteroarylalkyl, or substituted or unsubstituted C3-30 heteroaryloxy, and
- *, * ′ and *″ each indicates a point of attachment to a respective adjacent oxygen atom;
- each L1 is independently a single bond or a divalent linking group;
- each L2 is a single bond or a linking group;
- each Ar1 is independently substituted or unsubstituted C6-30 arylene or substituted or unsubstituted C3-30 heteroarylene, wherein the substituted C6-30 arylene and the substituted C3-30 heteroarylene are each independently substituted with at least one of halogen, C1-30 alkyl, C1-30 alkoxy, C4-30 cycloalkyl, C3-30 heterocycloalkyl, C2-30 alkenyl, C2-30 alkynyl, C6-30 aryl, C7-30 arylalkyl, C7-30 alkylaryl, C6-30 aryloxy, C3-30 heteroaryl, C4-30 alkylheteroaryl, C4-30 heteroarylalkyl, or C3-30 heteroaryloxy;
- each R1 is independently an organic group comprising an acid-labile group;
- R2 and R3 are each independently hydrogen, or substituted or unsubstituted C1-30 alkyl;
- R2 and R3 together optionally form a ring via a single bond or a divalent linking group,
- wherein the ring is substituted or unsubstituted;
- m is an integer greater than or equal to 1;
- k is an integer from 1 to 5;
- r is 2 or 3, and
- wherein the compound is non-polymeric,
- wherein R1 has a structure represented by one of Formula (2a) or Formula (2b):
- wherein, in Formulae (2a) and (2b),
- R4 to R6 are each independently hydrogen, substituted or unsubstituted C1-20 alkyl, substituted or unsubstituted C3-20 cycloalkyl, substituted or unsubstituted C3-20 heterocycloalkyl, substituted or unsubstituted C2-20 alkenyl, substituted or unsubstituted C3-20 cycloalkenyl, substituted or unsubstituted C3-20 heterocycloalkenyl, substituted or unsubstituted C6-20 aryl, or substituted or unsubstituted C2-20 heteroaryl, provided that no more than one selected from R4 to R6 is hydrogen, and provided that if one of R4 to R6 is hydrogen, then at least one of the others from R4 to R6 substituted or unsubstituted C6-20 aryl or substituted or unsubstituted C3-20 heteroaryl,
- each of R4 to R6 may optionally further include a divalent linking group as part of its structure,
- R7 and R8 are each independently hydrogen, substituted or unsubstituted C1-20 alkyl, substituted or unsubstituted C3-20 cycloalkyl, substituted or unsubstituted C3-20 heterocycloalkyl, substituted or unsubstituted C6-20 aryl, or substituted or unsubstituted C2-20 heteroaryl,
- each of R7 and R8 may optionally further include a divalent linking group as part of its structure,
- R9 is substituted or unsubstituted C1-20 alkyl, substituted or unsubstituted C3-20 cycloalkyl, substituted or unsubstituted C3-20 heterocycloalkyl, substituted or unsubstituted C6-20 aryl, or substituted or unsubstituted C3-20 heteroaryl,
- R9 optionally may further comprise a divalent linking group as part of its structure,
- any two of R4 to R6 together optionally may form a ring via a single bond or a divalent linking group, wherein the ring is substituted or unsubstituted,
- R7 and R8 together optionally may form a ring via a single bond or a divalent linking group, wherein the ring is substituted or unsubstituted,
- any one or more of R7 or R8 together with Ro optionally may form a ring via a single bond or a divalent linking group, wherein the ring is substituted or unsubstituted, and
- * and *′ each indicate a binding site to L1.
28 more elements
Dependencies are inferred from the claim text.