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US 12,656,620 B2Granted
Optical delay system
AssigneeNikon Corporation
InventorsDaniel Gene Smith, Brian Lee Stamper
Life of this patent
Estimating the term…
Abstract
An optical system includes a first optical system, a second optical system, and a third optical system. The first optical system divides an input beam into a first light and a second light. The second optical system includes a concave reflective surface which reflects the first light. The third optical system directs at least one of the first light reflected from the second optical system and the second light from the first optical system to an output optical path of the third optical system.
Claims35
An optical system comprising:
- a first optical system which divides an input beam into a first light and a second light and directs the first light and the second light to different directions;
- a second optical system, which is different from the first optical system, and includes (i) a concave reflective surface which reflects the first light and (ii) a lens through which the reflected first light passes;
- and
- a third optical system that is different from the first optical system and the second optical system, the first light reflected from the concave reflective surface of the second optical system entering into the third optical system from a first direction without passing through the first optical system but having passed through the lens of the second optical system, the second light from the first optical system entering into the third optical system from a second direction different from the first direction, and the third optical system directing the first light and the second light to an output optical path of the third optical system.
1 more element
An optical system comprising:
- a time delay system including:
- a first optical element which (i) divides an input beam that is from an illumination source and has not passed through any diffractive element into a first light and a second light and (ii) directs the first light and the second light to different directions;
- a second optical element into which the first light and the second light enter from different directions, the second optical element (i) combining a part of the first light and a part of the second light so as to output a third light to a first direction and (ii) combining a part of the first light and a part of the second light so as to output a fourth light to a second direction that is different from the first direction;
- a third optical element into which the third light and the fourth light enter from different directions, the third optical element combining a part of the third light and a part of the fourth light so as to output a fifth light;
- and
- a first fly's eye into which the fifth light enters to illuminate a target plane.
3 more elements
An optical system comprising:
- a beam divider which divides an input beam into a first light and a second light and directs the first light and the second light to different directions;
- an intermediate optical part including a refractive surface, which refracts the first light, and a concave mirror that reflects the first light from the refractive surface;
- and
- a beam combiner which is different from the beam divider and directs the first light and the second light from the concave mirror to a same direction,
- wherein the first light from the concave mirror of the intermediate optical part enters the beam combiner from a first direction without passing through the beam divider but having passed through the refractive surface of the intermediate optical part.
2 more elements
An optical system comprising:
- a beam divider which divides an input beam into a first light and a second light and directs the first light and the second light to different directions;
- an intermediate optical part including a first surface, which reflects the first light from the beam divider and which has concave shape, and a second surface that reflects the first light from the first surface and directs the first light to the first surface;
- and
- a beam combiner, the first light from the second surface entering the beam combiner from a first direction without passing through the beam divider, the second light entering the beam combiner from a second direction different from the first direction, and the beam combiner directing the first light from the second surface and the second light to a same direction,
- wherein the first light traveling from the second surface to the beam combiner passes through the first surface.
2 more elements
Dependencies are inferred from the claim text.