Processing system, management device, and log acquisition method

A management device connected to be capable of performing information communication with a plurality of testers, the plurality of testers being configured to test a semiconductor device, the management device comprising:

• a processor;
• and
• a memory storing program instructions that cause the processor to:
• collectively output a request command for requesting log information related to a state of the tester to one or more selected testers determined by selecting all the plurality of testers or some of the plurality of testers, and acquire the log information from the selected tester that has received the request command;
• and
• determine whether tester-side identification information included in the selected tester that is acquired based on the request command matches management identification information of the selected tester held in advance,
• wherein the management device acquires the log information in response to determining that the tester-side identification information matches the management identification information, and disables acquisition of the log information in response to determining that the tester-side identification information does not match the management identification information.

A log acquisition method of a processing system including a plurality of testers configured to test a semiconductor device, and a management device connected to be capable of performing information communication with the plurality of testers, the plurality of testers being arranged in a height direction in two or more levels, each of the plurality of testers including a tester-side storage unit configured to store log information related to a state of the tester, and the log acquisition method comprising:

• collectively outputting, by the management device, a request command for requesting the log information to one or more selected testers determined by selecting all of the plurality of testers or some of the plurality of testers;
• determining whether tester-side identification information included in the selected tester matches management identification information of the selected tester included in the management device;
• disabling acquisition of the log information to the management device in response to determining that the tester-side identification information does not match the management identification information;
• and
• causing the management device to acquire the log information from the selected tester in response to determining that the tester-side identification information matches the management identification information.