Electrostatic field strength measurement

A method, comprising:

• retrieving a plurality of electrostatic field strength maps generated in association with a semiconductor fabrication component over a period of time;
• training a machine learning model using the plurality of electrostatic field strength maps to generate a trained machine learning model;
• emitting a laser signal to the semiconductor fabrication component;
• receiving a reflection signal comprising light, of the laser signal, reflected by a surface of the semiconductor fabrication component;
• filtering the reflection signal to provide filtered light that has a wavelength within a defined range of wavelengths;
• generating an electrical signal based upon the filtered light;
• and
• determining, based upon the electrical signal, measures of electrostatic field strength at the surface of the semiconductor fabrication component;
• generating an electrostatic field strength map based upon the measures of electrostatic field strength;
• and
• detecting an electrostatic event based upon the electrostatic field strength map wherein detecting the electrostatic event is performed using the trained machine learning model.

A semiconductor processing method, comprising:

• retrieving a plurality of electrostatic field strength maps generated in association with a semiconductor fabrication component over a period of time;
• training a machine learning model using the plurality of electrostatic field strength maps to generate a trained machine learning model;
• receiving, in a processing chamber of the semiconductor fabrication component, a semiconductor wafer;
• emitting a laser signal to the semiconductor wafer;
• receiving a reflection signal comprising light, of the laser signal, reflected by a surface of the semiconductor wafer;
• filtering the reflection signal to provide filtered light that has a wavelength within a defined range of wavelengths;
• generating an electrical signal based upon the filtered light;
• determining, based upon the electrical signal, one or more measures of electrostatic field strength at the surface of the semiconductor wafer;
• performing, using the semiconductor fabrication component and based upon the one or more measures of electrostatic field strength, a semiconductor fabrication process on the semiconductor wafer;
• generating an electrostatic field strength map based upon the one or more measures of electrostatic field strength;
• and
• detecting an electrostatic event based upon the electrostatic field strength map wherein detecting the electrostatic event is performed using the trained machine learning model.