Substrate processing apparatus and substrate processing method
AssigneeTokyo Electron Limited
InventorsKoudai Higashi, Masato Hayashi, Kohei Noguchi
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Abstract
A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.
Claims20
A substrate processing apparatus, comprising:
- a supply channel through which a liquid to be supplied to a substrate flows;
- a flow path constituting a part of the supply channel;
- a light projector configured to radiate light, which is near-infrared light, toward the flow path;
- a light receiver configured to receive light emitted from the flow path;
- and
- a counter configured to receive a signal from the light receiver and detect a foreign substance in the liquid based on the signal obtained,
- wherein the light projector includes:
- a light source;
- and
- a reflector configured to reflect a light from the light source toward the flow path, the reflector forming a front end side light path of the light before the light enters the flow path, such that the reflected light passes through the flow path and is detected by the light receiver.
A substrate processing apparatus, comprising:
- a supply channel through which a liquid to be supplied to a substrate flows;
- a flow path constituting a part of the supply channel;
- a light projector configured to radiate light, which is near-infrared light, toward the flow path;
- a light receiver configured to receive light emitted from the flow path;
- and
- a counter configured to receive a signal from the light receiver and detect a foreign substance in the liquid based on the signal obtained;
- and
- a camera configured to obtain image data, the camera being disposed on a first side of the flow path opposite to a second side of the flow path where the light from the light projector is radiated,
- wherein the light radiated from the light projector passes through an interior of the flow path and is received by the camera.
A substrate processing method performed in a substrate processing apparatus,
- wherein the substrate processing apparatus includes:
- a supply channel through which a liquid to be supplied to a substrate flows;
- a flow path constituting a part of the supply channel;
- a light projector configured to radiate light, which is near-infrared light, toward the flow path;
- a light receiver configured to receive light emitted from the flow path;
- and
- a counter configured to receive a signal from the light receiver and detect a foreign substance in the liquid based on the signal obtained,
- wherein the light projector includes:
- a light source;
- and a reflector configured to reflect a light from the light source toward the flow path,
- wherein the substrate processing method includes:
- generating light toward the flow path and forming a front end side light path of the light before the light enters the flow path by the light source and the reflector, such that the reflected light passes through the flow path and is detected by the light receiver;
- receiving light emitted from the flow path by the light receiver as a result of the generating of the light toward the flow path;
- and
- detecting a foreign substance in the liquid based on the signal obtained by the receiving of the light.
Dependencies are inferred from the claim text.