Non-destructive inspection and manufacturing metrology systems and methods
AssigneeOnto Innovation Inc.
InventorsManjusha Mehendale, Marco Alves, Robin A. Mair
Life of this patent
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Abstract
Measuring or inspecting samples through non-destructive systems and methods. Multiple light pulses emitted from a light source. The light pulses are split into pump pulses and probe pulses. A first probe pulse reaches the surface of a sample after a first time duration after a first pump pulse reaches the surface. A second pump pulse reaches the surface after a time duration after the first probe pulse. When the second pump pulse reflects off the sample, the second pump pulse may be altered by an acoustic wave generated by the first probe pulse. The reflected second pump pulse may be analyzed to determine a characteristic of the sample.
Claims21
A method comprising:
- producing a pump pulse and a probe pulse from light;
- splitting the pump pulse into a primary pump pulse and a secondary pump pulse;
- generating a difference between a beam path length of the primary pump pulse and a beam path length of the secondary pump pulse;
- directing the primary pump pulse and the secondary pump pulse to a measurement point on a sample;
- directing the probe pulse to the measurement point on the sample;
- and
- detecting the probe pulse after it has reflected from the measurement point.
A system comprising:
- a light source configured to emit a pulse of light;
- a first beam splitter positioned to split the pulse of light into a pump pulse and a probe pulse;
- a second beam splitter positioned in a beam path of the pump pulse to split the pump pulse into a primary pump pulse and a secondary pump pulse;
- at least one mirror positioned in a beam path of the secondary pump pulse to cause a beam path length of the secondary pump pulse to be longer than the beam path length of the primary pump pulse;
- one or more focusing optics positioned to direct the primary pump pulse, the secondary pump pulse, and the probe pulse to a measurement point on a sample;
- and
- a detector positioned to receive the probe pulse after it has reflected from the measurement point.
Dependencies are inferred from the claim text.