Gas measurement device, gas measurement system, and gas measurement method
AssigneesSintokogio, Ltd., National University Corporation Toyohashi University of Technology
InventorsManase Mizutani, Yoshihisa Suzuki, Kazuaki Sawada, Toshihiko Noda
Life of this patent
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Abstract
The gas measurement device includes a filter unit including a plurality of terminals configured to be applied a voltage or a current and a filter configured to vibrate in response to the voltage or the current being applied to the plurality of terminals and a gas sensor configured to detect gas molecules passing through the filter and output a measurement value corresponding to the detected gas molecules.
Claims8
A gas measurement device, comprising:
- a filter unit including a plurality of terminals configured to be applied a voltage or a current, a pair of supporting members electrically connected to the plurality of terminals, and a filter bridged between the pair of supporting members and having a mesh structure configured to sieve gas molecules, wherein the filter is configured to vibrate in response to the voltage or the current being applied to the plurality of terminals;
- and
- a gas sensor configured to detect the gas molecules passing through the filter and output a measurement value corresponding to the detected gas molecules.
A gas measurement system, comprising:
- a gas measurement device comprising:
- a filter unit including a plurality of terminals configured to be applied a voltage or a current, and pair of supporting members electrically connected to the plurality of terminals, and a filter bridged between the pair of supporting members and having a mesh structure configured to sieve gas molecules, wherein the filter is configured to vibrate in response to the voltage or the current being applied to the plurality of terminals;
- and
- a gas sensor configured to detect the gas molecules passing through the filter and output a measurement value corresponding to the detected gas molecules;
- and
- a controller configured to apply the voltage or the current to the plurality of terminals such that the filter vibrates at a predetermined frequency.
A gas measurement method, comprising:
- vibrating a filter bridged between a pair of supporting members and having a mesh structure configured to sieve gas molecules by applying the voltage or the current to a plurality of terminals electrically connected to the pair of supporting members;
- and
- detecting the gas molecules that have passed through the vibrated filter and outputting a measurement value corresponding to the detected gas molecules.
Dependencies are inferred from the claim text.