Microelectromechanical pressure sensor
AssigneeRobert Bosch GmbH
InventorJonas Boettinger
Life of this patent
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Abstract
A microelectromechanical pressure sensor having a housing unit, a base structure, a pressure sensor element, and a deflection measuring element. The housing unit defines a receiving space. The base structure, the pressure sensor element, and the deflection measuring element are arranged in the receiving space. The receiving space is filled with a protective medium which covers the pressure sensor element. The pressure sensor element is arranged so as to be deflectable relative to the base structure. The deflection measuring element is configured to determine a relative deflection of the pressure sensor element relative to the base structure. A method for correcting pressure measurement values of a microelectromechanical pressure sensor is also described.
Claims14
A microelectromechanical pressure sensor, comprising:
- a housing unit;
- a base structure;
- a pressure sensor element;
- and
- a deflection measuring element;
- wherein the housing unit defines a receiving space, wherein the base structure, the pressure sensor element, and the deflection measuring element are arranged in the receiving space, wherein the receiving space is filled with a protective medium which covers the pressure sensor element, wherein the pressure sensor element is arranged so as to be deflectable relative to the base structure, and wherein the deflection measuring element is configured to determine a relative deflection of the pressure sensor element relative to the base structure.
A method for correcting pressure measurement values of a microelectromechanical pressure sensor, the pressure sensor including:
- a housing unit,
- a base structure,
- a pressure sensor element, and
- a deflection measuring element,
- wherein the housing unit defines a receiving space, wherein the base structure, the pressure sensor element, and the deflection measuring element are arranged in the receiving space, wherein the receiving space is filled with a protective medium which covers the pressure sensor element, wherein the pressure sensor element is arranged so as to be deflectable relative to the base structure, and wherein the deflection measuring element is configured to determine a relative deflection of the pressure sensor element relative to the base structure,
- wherein the method comprises the following steps:
- recording at least one pressure measurement value of the pressure sensor element;
- recording at least one deflection value of the deflection measuring element, wherein the deflection value describes a deflection of the pressure sensor element relative to the base structure;
- ascertaining, based on the deflection value, a pressure value which acts on the pressure sensor element as a result of the protective medium;
- correcting the pressure measurement value measured by the pressure sensor element using the ascertained pressure value which acts on the pressure sensor element as a result of the protective medium;
- and
- outputting a corrected pressure measurement value.
A computing unit which is configured to correct pressure measurement values of a microelectromechanical pressure sensor, the pressure sensor including:
- a housing unit,
- a base structure,
- a pressure sensor element, and
- a deflection measuring element,
- wherein the housing unit defines a receiving space, wherein the base structure, the pressure sensor element, and the deflection measuring element are arranged in the receiving space, wherein the receiving space is filled with a protective medium which covers the pressure sensor element, wherein the pressure sensor element is arranged so as to be deflectable relative to the base structure, and wherein the deflection measuring element is configured to determine a relative deflection of the pressure sensor element relative to the base structure,
- wherein the computing unit is configured to:
- record at least one pressure measurement value of the pressure sensor element;
- record at least one deflection value of the deflection measuring element, wherein the deflection value describes a deflection of the pressure sensor element relative to the base structure;
- ascertain, based on the deflection value, a pressure value which acts on the pressure sensor element as a result of the protective medium;
- correct the pressure measurement value measured by the pressure sensor element using the ascertained pressure value which acts on the pressure sensor element as a result of the protective medium;
- and
- output a corrected pressure measurement value.
A non-transitory computer-readable medium on which is stored a computer program including instructions for correcting pressure measurement values of a microelectromechanical pressure sensor, the pressure sensor including:
- a housing unit,
- a base structure,
- a pressure sensor element, and
- a deflection measuring element,
- wherein the housing unit defines a receiving space, wherein the base structure, the pressure sensor element, and the deflection measuring element are arranged in the receiving space, wherein the receiving space is filled with a protective medium which covers the pressure sensor element, wherein the pressure sensor element is arranged so as to be deflectable relative to the base structure, and wherein the deflection measuring element is configured to determine a relative deflection of the pressure sensor element relative to the base structure,
- wherein the instructions, when executed by a computer, causing the computer to perform the following steps:
- recording at least one pressure measurement value of the pressure sensor element;
- recording at least one deflection value of the deflection measuring element, wherein the deflection value describes a deflection of the pressure sensor element relative to the base structure;
- ascertaining, based on the deflection value, a pressure value which acts on the pressure sensor element as a result of the protective medium;
- correcting the pressure measurement value measured by the pressure sensor element using the ascertained pressure value which acts on the pressure sensor element as a result of the protective medium;
- and
- outputting a corrected pressure measurement value.
Dependencies are inferred from the claim text.