Force sensor and method for manufacturing force sensor
AssigneesSintokogio, Ltd., Tohoku University
InventorsYoshikane Tanaami, Miyuki Hayashi, Yoshiaki Kanamori, Taiyu Okatani
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Abstract
Provided is a force sensor including: a first substrate that is made of a material that transmits electromagnetic waves and includes a metal array arranged in a periodic pattern on its surface; a second substrate that is disposed to face the first substrate with a gap therebetween and includes a metal layer that reflects the electromagnetic waves transmitted through the first substrate on its surface; a connecting member configured to connect the first substrate to the second substrate and define an internal space that houses the metal array and the metal layer; and an inert substance that fills the internal space.
Claims5
A force sensor comprising:
- a first substrate that is made of a material that transmits electromagnetic waves and includes a metal array arranged in a periodic pattern on a surface of the first substrate;
- a second substrate that is disposed to face the first substrate with a gap therebetween and includes a metal layer that reflects the electromagnetic waves transmitted through the first substrate on a surface of the second substrate;
- a connecting member configured to connect the first substrate to the second substrate and define an internal space that houses the metal array and the metal layer;
- an inert substance filling the internal space;
- and
- a sealing member,
- wherein the force sensor is configured such that a posture of the first substrate relative to the second substrate is changed in accordance with a load from an outside, and
- wherein the connecting member includes an opening that communicates the internal space with the outside, and the sealing member seals the opening.
A method for manufacturing a force sensor comprising:
- preparing a first substrate that is made of a material that transmits electromagnetic waves and includes a metal array arranged in a periodic pattern on a surface of the first substrate, a second substrate that is disposed to face the first substrate with a gap therebetween and includes a metal layer that reflects the electromagnetic waves transmitted through the first substrate on a surface of the second substrate, and a connecting member configured to connect the first substrate to the second substrate, define an internal space that houses the metal array, and include an opening that communicates the internal space with an outside;
- decompressing the internal space from the opening;
- filling the decompressed internal space with an inert substance through the opening;
- and
- sealing the opening with a sealing member,
- wherein the force sensor is configured such that a posture of the first substrate relative to the second substrate is changed in accordance with a load from the outside.
Dependencies are inferred from the claim text.