US 12,656,106 B1Granted

Method and apparatus for measuring inner surface and transition curved surface contour of micropore

AssigneeHuazhong University of Science and Technology

InventorsWenlong Lu, Yunquan Wu

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Abstract

A method and an apparatus for measuring an inner surface and a transition curved surface contour of a micropore are provided. The apparatus includes three independent optical paths, a spectrometer and a processing unit. The three optical paths use a fiber-reflecting prism-dispersive metalens structure. By adjusting the position of a probe, light can be irradiated on the inner surface and the transition curved surface contour of the micropore, and each scanning point on the surface can be scanned. The spectrometer analyzes the reflection spectrum received by each optical fiber in real time, and extracts peak wavelength of the scanning point. The processing unit calculates a displacement value of each scanning point based on a wavelength-displacement mapping relationship, reconstructs position information, and obtains a contour of a surface through data fitting.

Claims10

Dependent claims

An apparatus for measuring an inner surface and a transition curved surface contour of a micropore, comprising:

at least three optical paths comprising a first optical path, a second optical path and a third optical path,
wherein the first optical path comprises a first optical fiber, a first reflecting prism and a first dispersive metalens, and divergent light emitted by the first optical fiber is reflected to the first dispersive metalens via the first reflecting prism and focused on a surface of a measured object through the first dispersive metalens;
the second optical path comprises a second optical fiber, a second reflecting prism and a second dispersive metalens, and divergent light emitted by the second optical fiber is reflected to the second dispersive metalens via the second reflecting prism and focused on the surface of the measured object through the second dispersive metalens;
and
the third optical path comprises a third optical fiber, a third reflecting prism and a third dispersive metalens, and divergent light emitted by the third optical fiber is reflected to the third dispersive metalens via the third reflecting prism and focused on the surface of the measured object through the third dispersive metalens;
a spectrometer configured to analyze reflected lights from the surface of the measured object returning along respective original optical paths and received by the first optical fiber, the second optical fiber and the third optical fiber, respectively, and to output wavelength sequence data and light intensity sequence data of a scanning point for each optical path;
a processing unit configured to:
obtain a peak wavelength of each scanning point according to the wavelength sequence data and the light intensity sequence data of each scanning point, and determine a displacement value corresponding to each scanning point according to the peak wavelength of each scanning point;
determine spatial position information of each scanning point according to the displacement value corresponding to each scanning point;
and
fit spatial position information of all scanning points to determine a contour of the surface of the measured object;
wherein the contour of the surface of the measured object comprises the inner surface and the transition curved surface contour of the micropore;
wherein the inner surface of the micropore is determined by using a scanning point corresponding to the first optical path;
and
the transition curved surface contour is determined by using scanning points corresponding to all optical paths.

12 more elements

A method for measuring an inner surface and a transition curved surface contour of a micropore, comprising:

projecting optical signals to a surface of a measured object through at least three optical paths, wherein:
in a first optical path, divergent light emitted by a first optical fiber is reflected via a first reflecting prism and focused on the surface of the measured object through a first dispersive metalens;
in a second optical path, divergent light emitted by a second optical fiber is reflected via a second reflecting prism and focused on the surface of the measured object through a second dispersive metalens;
and
in a third optical path, divergent light emitted by a third optical fiber is reflected via a third reflecting prism and focused on the surface of the measured object through a third dispersive metalens;
receiving reflected lights from the surface of the measured object returning along respective original optical paths by the first optical fiber, the second optical fiber and the third optical fiber, respectively, analyzing the reflected lights by a spectrometer to output wavelength sequence data and light intensity sequence data of a scanning point for each optical path;
obtaining a peak wavelength of each scanning point according to the wavelength sequence data and the light intensity sequence data of each scanning point, and determining a displacement value corresponding to each scanning point according to the peak wavelength of each scanning point;
determining spatial position information of each scanning point according to the displacement value corresponding to each scanning point;
and
fitting spatial position information of all scanning points to determine a contour of the surface of the measured object;
wherein the contour of the surface of the measured object comprises the inner surface and the transition curved surface contour of the micropore;
wherein the inner surface of the micropore is determined by using a scanning point corresponding to the first optical path;
and
the transition curved surface contour is determined by using scanning points corresponding to all optical paths.

11 more elements

Dependencies are inferred from the claim text.