Adjustment method for shape measuring device

An adjustment method for a shape measuring device that radiates light from a light source to a master for adjustment and a reference surface respectively as measurement light and reference light and measures a shape of a surface to be measured of a measurement target using multiplexed light of the measurement light and the reference light respectively reflected by the master for adjustment and the reference surface, the adjustment method comprising:

• measuring the master for adjustment to calculate a roughness parameter;
• moving the refence surface to a position at which the roughness parameter becomes maximum;
• and
• detecting an optical axis displacement in two directions perpendicular to each other, based on a result of measurement performed using as the master for adjustment, a master having a pattern in which an identical pattern is repeated in a direction in a range that covers a range of a field of view of an objective lens which emits a measurement light, and a result of measurement further performed in a state where the master is rotated by 90 degrees.

An adjustment method for a shape measuring device that radiates light from a light source to a master for adjustment and a reference surface respectively as measurement light and reference light and measures a shape of a surface to be measured of a measurement target using multiplexed light of the measurement light and the reference light respectively reflected by the master for adjustment and the reference surface, the adjustment method comprising:

• measuring the master for adjustment to calculate a roughness parameter;
• moving the refence surface to a position at which the roughness parameter becomes maximum;
• and
• detecting an optical axis displacement in two directions different from each other, based on a result of measurement performed using as the master for adjustment, a master having a pattern in which an identical pattern is repeated in two directions different from each other, in a range that covers a range of a field of view of an objective lens which emits a measurement light.

An adjustment method for a shape measuring device that radiates light from a light source to a master for adjustment and a reference surface respectively as measurement light and reference light and measures a shape of a surface to be measured of a measurement target using multiplexed light of the measurement light and the reference light respectively reflected by the master for adjustment and the reference surface, the adjustment method comprising:

• measuring the master for adjustment in an adjusted state in which a focus position matches an interference position, and calculating and storing a matching degree parameter indicating a matching degree between the focus position and the interference position as an adjustment matching degree parameter;
• in a case where the measurement target is measured, measuring the master for adjustment, calculating the matching degree parameter and comparing the matching degree parameter with the adjustment matching degree parameter, to confirm the matching degree;
• and
• in a case where only an absolute value of a position of the reference surface is known, readjusting the matching degree based on a polarity of a correlation between the matching degree parameter and the position of the reference surface, and a matching degree parameter calculated at one position of the reference surface.