Turbomolecular pump
AssigneeDetect-Ion LLC
InventorsWei Yang, Jorge Martinez, Ashish Chaudhary
Life of this patent
Estimating the term…
Abstract
A turbomolecular pump including a stator. The stator includes a mounting base, stator walls connected with the mounting base, and a channel that extends between the stator walls and through the mounting base. The turbomolecular pump includes a motor positioned within the channel. The motor includes a shaft, a rotator connected with the shaft, and a stem that fixedly connects the rotator and the mounting base. The turbomolecular pump includes a rotor that encloses the rotator, shaft, and a portion of the stem, and the rotor is configured to rotate relative to the stator to drive fluid flow through the channel towards the mounting base.
Claims20
A turbomolecular pump, comprising:
- a. a stator comprising:
- i. a mounting base;
- ii. stator walls;
- and
- iii. a channel that extends between the stator walls, an inlet, and an outlet;
- b. a motor positioned within the channel, comprising:
- i. a shaft;
- ii. a rotator connected with the shaft;
- and
- c. a stem that fixedly connects the rotator and the mounting base and is at least partially exposed to the channel;
- and
- d. a rotor that is rotationally supported by the stem and the shaft, is enclosed by the stator walls within the channel, encloses the rotator, shaft, and a portion of the stem, and is configured to rotate relative to the stator to drive between the inlet and the outlet.
A turbomolecular pump, comprising:
- a. a rotational assembly, comprising:
- i. a stator that defines a channel;
- and
- ii. a rotor enclosed within one or more stator internal surfaces of the stator, positioned within the channel, and configured to rotationally interface with the stator to drive fluid flow through the channel;
- b. a motor enclosed by one or more rotor internal surfaces of the rotor, separated from the channel by the rotor, and fixedly connected with the rotor at a shaft;
- and
- c. a stem that connects with the motor, wherein the rotor is connected with and configured to rotate about the stem.
A turbomolecular pump, comprising:
- a. a rotational assembly, comprising:
- i. a stator that defines a channel by one or more internal stator walls with an entry opening and an exit opening;
- and
- ii. a rotor positioned within the channel and the one or more internal stator walls and configured to rotate relative to the stator to drive fluid flow from the entry opening to the exit opening;
- b. a motor partially enclosed by one or more internal rotor walls of the rotor, connected with the rotor at a shaft, and connected with a stem;
- and
- c. a bearing system connected with the rotor at the stem, the bearing system that separates some of the stem from the channel.
Dependencies are inferred from the claim text.