Wafer susceptor
AssigneeEnkris Semiconductor, Inc.
InventorsKai Cheng, Liyang Zhang
Life of this patent
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Abstract
Disclosed is a wafer susceptor. A groove bottom of the wafer susceptor is divided by a first dividing line passing through a center of a groove into a first region close to a center of the wafer susceptor and a second region away from the center of the wafer susceptor. The groove bottom includes a groove bottom surface and a convex structure formed on the groove bottom surface. An average height of the convex structure located in the second region is greater than that of the convex structure located in the first region. A design structure of the groove bottom of the wafer susceptor well matches a warped III-V group nitride wafer in an active region epitaxial process.
Claims10
A wafer susceptor, comprising at least one groove, wherein the groove comprises:
- a groove bottom, wherein the groove bottom is divided by a first dividing line passing through a center of the groove into a first region and a second region, the first region is closer to a center of the wafer susceptor than the second region, the groove bottom comprises a groove bottom surface and a convex structure formed on the groove bottom surface, a point, closest to the center of the wafer susceptor, on an edge of the convex structure is a first edge point, and a point, farthest away from the center of the wafer susceptor, on the edge of the convex structure is a second edge point,
- wherein an average height of the convex structure located in the second region is greater than that of the convex structure located in the first region,
- a surface of the convex structure is a curved surface, the curved surface is provided with a vertex, and a projection of the vertex on a horizontal plane is located in the second region of the groove bottom,
- wherein the groove further comprises a groove side portion, and the edge of the convex structure abuts against the groove side portion.
Dependencies are inferred from the claim text.