Metal components with inert vapor phase coating on internal surfaces
AssigneeAgilent Technologies, Inc.
InventorsElizabeth Carr, Karen Seaward, Kevin P. Killeen
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Abstract
One aspect of the invention provides a method of making a thermal vapor coated article including a chemical vapor deposition of a coating on a surface of the article. The method includes exposing the article to one or more of (i) an inorganic precursor, (ii) an organic molecular precursor, (iii) a precursor to produce oxides or nitrides, or (iv) a combination thereof, wherein the coating is one or more of resistant to adhesion of biomolecules to the coated surface or inert to analytes in contact with the coated surface.
Claims15
A method of coating a liquid chromatograph instrument component by a vapor phase process, the method comprising:
- introducing a vapor phase material comprising an inorganic precursor, an organic molecular precursor, or a combination thereof, a precursor to produce oxides, and a precursor to produce nitrides into an interior surface of a lumen of a metal liquid chromatograph instrument component to form a coating on the interior surface of the lumen, the lumen having an inner diameter of less than 3 mm and a length greater than 20 mm;
- removing any vapor phase material that has not become part of the coating on the interior surface of the lumen;
- and
- repeating the vapor phase material introduction until a desired coating thickness and/or composition is achieved, wherein the coating formed on the interior surface of the lumen is resistant to adhesion of biomolecules and/or inert to analytes.
Dependencies are inferred from the claim text.