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US 12,655,014 B2Granted
Direct drive MEMS scanning micromirror
AssigneeMeta Platforms Technologies, LLC
InventorsKatherine Marie Smyth, Kenneth Alexander Diest, Brian Wheelwright, Daniel Guenther Greif
Life of this patent
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Abstract
A direct drive scanning micromirror includes a mirror body defining a mirror surface, and a plurality of curved cantilevers that each extend directly from the mirror body. The shape of the cantilevers and the geometry of the interface between the cantilevers and the mirror body are configured to decrease peak stresses within the micromirror during operation, which may beneficially impact performance and lifetime.
Claims18
An artificial reality optical display comprising:
- a direct drive scanning micromirror comprising:
- a mirror body defining a mirror surface;
- and
- at least three curved cantilevers extending directly from the mirror body, wherein a width of each of the at least three curved cantilevers increases with decreasing distance from the mirror body.
1 more element
An artificial reality optical display comprising:
- a direct drive MEMS scanning micromirror comprising:
- a mirror body defining a mirror surface;
- and
- a plurality of curved cantilevers extending from the mirror body, wherein a width of a portion of each of the plurality of curved cantilevers decreases with increasing distance from the mirror body.
1 more element
Dependencies are inferred from the claim text.