Processing liquid providing apparatus and substrate treating system including the same
AssigneeSemes Co., Ltd.
InventorsDai Geon Yoon, Soo Hong Lee, Dong Hwa Lee, Ji Hyeon Kim, Sang Hwa Lee, Dae Sung Kim
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AssigneeSemes Co., Ltd.
InventorsDai Geon Yoon, Soo Hong Lee, Dong Hwa Lee, Ji Hyeon Kim, Sang Hwa Lee, Dae Sung Kim
Estimating the term…
Provided are an apparatus for providing a substrate processing liquid having an optimal structure in the correlation between securing internal agitation fluidity and recovery of sloshing, and a substrate processing system including the same. The apparatus for providing substrate processing liquid comprises a storage tank for storing substrate processing liquid, and a partition wall installed inside the storage tank and for dividing an internal space of the storage tank, wherein the apparatus is connected to a substrate processing apparatus for discharging the substrate processing liquid onto a substrate to provide the substrate processing liquid to the substrate processing apparatus, wherein the partition wall includes a plurality of holes formed passing through one surface and the other surface.
An apparatus for providing substrate processing liquid comprising:
A method for processing a substrate comprising:
Dependencies are inferred from the claim text.