Polishing device for delayering

A polishing device for delayering comprising:

• a stage which is installed to move along the X-axis and the Y-axis, and is rotatable about its own axis;
• a holder installed above the stage and supporting an object seated on an upper surface there of;
• and
• a grinder unit installed to be movable above the holder and comprising a main body and a tool unit rotatably installed at a lower portion of the main body, the tool unit including a polishing pad on a lower surface of the tool unit corresponding to the object,
• wherein the holder comprises:
• a rotating plate which includes a seating groove with a depth lower than the height of the object formed on an upper surface thereof, is installed to move along the X-axis and the Y-axis in an installation target area, and is rotatable about its own axis;
• a fixing block installed on one side of an inner wall of the rotating plate, and an elastic member configured to elastically press the fixing block toward the object so as to elastically press a side of the object and thereby fix the object when the object is seated in the seating groove of the rotating plate;
• and
• a plurality of horizontal correction rings that protrude upward from an upper surface of the rotating plate and form concentric circles with the seating groove.