Processing apparatus
AssigneeDisco Corporation
InventorsTomoya Ogane, Miki Yoshida
Life of this patent
Estimating the term…
Abstract
A processing apparatus includes a holding table and a processing unit. The processing unit includes a spindle unit having a spindle and a housing in which the spindle is rotatably supported. The processing unit is connected to a spindle temperature adjusting unit for adjusting the temperature of the spindle unit to a predetermined temperature. The spindle temperature adjusting unit includes a circulation route through which a cooling liquid to be introduced into the housing circulates and a heat exchanger connected to the circulation route. The heat exchanger is supplied with a processing liquid, to lower the temperature of the cooling liquid flowing in the circulation route with the processing liquid and increase the temperature of the processing liquid with the cooling liquid.
Claims10
A processing apparatus including a holding table for holding a workpiece thereon, a processing unit for processing the workpiece held on the holding table, and a controller, wherein wherein:
- the processing unit includes a spindle unit having a spindle with a processing tool mounted thereon, a housing in which the spindle is rotatably supported, and an electric motor for rotating the spindle about its central axis,
- the processing apparatus further includes a spindle temperature adjusting unit for cooling the spindle of the spindle unit to adjust a temperature of the spindle to a predetermined temperature, the processing unit being connected to the spindle temperature adjusting unit,
- wherein the spindle temperature adjusting unit includes:
- a circulation route through which a cooling liquid to be introduced into the housing of the spindle unit and discharged from the housing circulates,
- a pump connected to the circulation route and configured to circulate the cooling liquid through the circulation route,
- a first heat exchanger connected to the circulation route, and
- a first temperature sensor connected to the circulation route upstream of the housing and configured to measure a temperature of the cooling liquid that is to flow into the housing, and
- wherein the first heat exchanger is supplied with a processing liquid supplied from a processing liquid supply source, whereby the processing liquid exchanges heat with the cooling liquid to thereby lower the temperature of the cooling liquid flowing in the circulation route and the cooling liquid exchanges heat with the processing liquid to thereby increase a temperature of the processing liquid, such that the cooling liquid discharged from the first heat exchanger is of a lower temperature than the cooling liquid that entered the first heat exchanger and the processing liquid discharged from the first heat exchanger is of a higher temperature than the processing liquid that entered the first heat exchanger;
- and
- wherein the first heat exchanger comprises a tube-type heat exchanger or a plate-type heat exchanger.
A processing apparatus including a holding table for holding a workpiece thereon, a processing unit for processing the workpiece held on the holding table, and a controller, wherein:
- the processing unit includes a spindle unit having a spindle with a processing tool mounted thereon, a housing in which the spindle is rotatably supported, and an electric motor for rotating the spindle about its central axis,
- the processing apparatus further includes a spindle temperature adjusting unit for cooling the spindle of the spindle unit to adjust a temperature of the spindle to a predetermined temperature, the processing unit being connected to the spindle temperature adjusting unit,
- wherein the spindle temperature adjusting unit includes:
- a circulation route through which a cooling liquid to be introduced into the housing of the spindle unit and discharged from the housing circulates,
- a pump connected to the circulation route and configured to circulate the cooling liquid through the circulation route,
- a first heat exchanger connected to the circulation route, and
- a first temperature sensor connected to the circulation route upstream of the housing and configured to measure a temperature of the cooling liquid that is to flow into the housing, and
- wherein the first heat exchanger is supplied with a processing liquid supplied from a processing liquid supply source, to lower the temperature of the cooling liquid flowing in the circulation route with the processing liquid and increase a temperature of the processing liquid with the cooling liquid,
- wherein the processing apparatus further comprises:
- a supply route in which the processing liquid flows from the first heat exchanger, wherein the processing liquid that is supplied from the processing liquid supply source to the first heat exchanger and that has a temperature increased by the first heat exchanger is supplied through the supply route to the workpiece held on the holding table or the processing tool, and
- a second heat exchanger connected to the supply route,
- wherein the processing liquid that has been supplied to the workpiece held on the holding table or the processing tool through the supply route and that has been used is introduced into the second heat exchanger, and
- wherein the second heat exchanger increases the temperature of the processing liquid flowing in the supply route with the used processing liquid.
Dependencies are inferred from the claim text.