Gas distribution faceplate with oblique flow paths

A showerhead comprising:

• a gas distribution faceplate, wherein:
• the gas distribution faceplate has a first side and a second side opposite the first side,
• the gas distribution faceplate includes a plurality of clusters of gas passages,
• each of the gas passages exits the first side of the gas distribution faceplate via a corresponding inlet gas port in the first side of the gas distribution faceplate and exits the second side of the gas distribution faceplate via a corresponding outlet gas port in the second side of the gas distribution faceplate,
• each outlet gas port is spaced apart, center-to-center, from the closest neighboring outlet gas port,
• one or more of the gas passages for each cluster of gas passages has at least a portion thereof that extends along a direction that is not parallel to a first axis that is perpendicular to an average midplane defined between the first side and the second side,
• the inlet gas ports within each cluster of gas passages are arranged in one or more circular arrays,
• the inlet gas ports for each cluster of gas passages are grouped around a respective center and the respective centers are distributed in a spaced-apart manner across the first side of the gas distribution faceplate,
• at least one of the one or more circular arrays in each cluster of gas passages includes at least three of the gas passages, and
• each inlet gas port of each cluster of gas passages is spaced apart, center-to-center, from each inlet gas port of each of the other clusters of gas passages.