Hole array layered structure, precoating method, membrane forming method and sequencing device

A sequencing device, comprising a biochip device and a membrane layer formed by the biochip device, wherein the biochip device comprises:

• a substrate;
• and a hole array layered structure for forming a membrane forming space with the substrate, wherein the membrane forming space is adapted to form the membrane layer, and the hole array layered structure comprises:
• a base plate;
• and
• a plurality of hole units provided in the base plate and arranged in an array, each hole unit penetrating through the base plate and comprising a first hole and a second hole stacked in a thickness direction of the base plate, the second hole being configured to be connected with the substrate, a projection of the first hole on a plane perpendicular to the thickness direction of the base plate having a first hole contour, a projection of the second hole on the plane perpendicular to the thickness direction of the base plate having a second hole contour, and the first hole contour surrounding the second hole contour on an outer side thereof,
• the second holes of the plurality of hole units are disconnected with each other to prevent mediums in the respective second holes from flowing among the second holes, and
• the first holes of the plurality of hole units are disconnected with each other to prevent mediums in the respective first holes from flowing among the first holes,
• wherein the hole array layered structure is located on the substrate, and the first holes of the plurality of hole units are located on a side of the second holes of the plurality of hole units facing away from the substrate;
• each hole unit of the hole array layered structure further comprises first tooth slots extending outward from a side wall of the first hole perpendicularly to the thickness direction of the base plate, the first tooth slots are provided in a circumferential direction of the first hole, and each of the first tooth slots has an opening communicated with the first hole at the first hole contour, and in a projection on the plane perpendicular to the thickness direction of the base plate, extension lengths from slot bottoms to the openings of the respective first tooth slots are different.