Filtering device, purification device, and method for manufacturing chemical liquid
AssigneeFUJIFILM Corporation
InventorsTadashi Omatsu, Tetsuya Kamimura, Tetsuya Shimizu, Satomi Takahashi
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Abstract
A filtering device is for obtaining a chemical liquid by purifying a liquid to be purified, and the filtering device has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series and extends from the inlet portion to the outlet portion, in which the filter A is a porous membrane containing a polyimide-based resin.
Claims19
A filtering device for obtaining a chemical liquid by purifying a liquid to be purified, the filtering device comprising:
- an inlet portion;
- an outlet portion;
- a filter A;
- at least one filter B different from the filter A;
- and
- a flow path which includes the filter A and the filter B arranged in series and extends from the inlet portion to the outlet portion,
- wherein the filter A is a porous membrane containing a polyimide-based resin,
- the filter B includes at least one filter BU that is disposed on an upstream side of the filter A on the flow path and has a pore size larger than a pore size of the filter A,
- the filter B includes at least one filter BD that is disposed on a downstream side of the filter A on the flow path and has a pore size smaller than a pore size of the filter A,
- the at least one filter BU includes a filter having a pore size equal to or greater than 50 nm and equal to or smaller than 200 nm and a filter containing a resin having an ion exchange group,
- the filter having a pore size equal to or greater than 50 nm and equal to or smaller than 200 nm is disposed on the upstream side of the filter containing a resin having an ion exchange group, and
- the filter having a pore size equal to or greater than 50 nm and equal to or smaller than 200 nm, the filter containing a resin having an ion exchange group, the filter A and the filter BD are arranged in series.
A method for manufacturing a chemical liquid by purifying a liquid to be purified, comprising:
- a filtration step of purifying the liquid to be purified by using a filtering device so as to obtain a chemical liquid,
- wherein the filtering device comprising:
- an inlet portion;
- an outlet portion;
- a filter A;
- at least one filter B different from the filter A;
- and
- a flow path which includes the filter A and the filter B arranged in series and extends from the inlet portion to the outlet portion,
- the filter A is a porous membrane containing a polyimide-based resin, and
- the filter B includes at least one filter BU that is disposed on an upstream side of the filter A on the flow path and has a pore size larger than a pore size of the filter A,
- the filter B includes at least one filter BD that is disposed on a downstream side of the filter A on the flow path and has a pore size smaller than a pore size of the filter A,
- the at least one filter BU includes a filter having a pore size equal to or greater than 50 nm and equal to or smaller than 200 nm and a filter containing a resin having an ion exchange group,
- the filter having a pore size equal to or greater than 50 nm and equal to or smaller than 200 nm is disposed on the upstream side of the filter containing a resin having an ion exchange group, and
- the filter having a pore size equal to or greater than 50 nm and equal to or smaller than 200 nm, the filter containing a resin having an ion exchange group, the filter A and the filter BD are arranged in series, and
- the chemical liquid is a resist solution.
Dependencies are inferred from the claim text.