US 12,652,983 B2 · Fluid delivery module

Abstract

Apparatuses for controlling fluid flow are important components for delivering process fluids for semiconductor fabrication. These apparatuses for controlling fluid flow require a variety of fluid flow components which are tightly packaged within the apparatuses for controlling flow. In an effort to improve packaging density, fluid delivery modules preferably incorporate both active and passive components into a single substrate block. This enables increases in packaging density as well as enabling reduced cost through greater simplification of the fluid delivery module. For instance, incorporating a filter to filter incoming fluid with a valve or other component in a single monolithic block avoids the need for separate components which add cost and complexity.

Claims21

Dependent claims

A fluid delivery module, comprising:

a support structure;
a substrate block mounted to the support structure, the substrate block comprising:
a monolithic body:
a component receiving port formed in the monolithic body;
a first fluid pathway formed in the monolithic body and extending from a first inlet opening to a first outlet opening at the component receiving port;
and
a second fluid pathway formed in the monolithic body and extending from a second inlet opening at the component receiving port to a second outlet opening;
a filter media positioned within the second fluid pathway that divides the second fluid pathway into a pre-filter section and a post-filter section;
and
an active flow component mounted on the monolithic body of the substrate block at the component receiving port and fluidly coupled to each of the first outlet opening and the second inlet opening.

7 more elements

Dependencies are inferred from the claim text.

Fluid delivery module

Life of this patent

Fluid delivery module

Life of this patent

Abstract

Claims21