Device wafer processing method
AssigneeDisco Corporation
InventorMasatoshi Wakahara
Life of this patent
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Abstract
A device wafer processing method includes a protective film forming step of forming a protective film that covers a face side of a device wafer, a mask forming step of, after the protective film forming step is carried out, applying a laser beam along streets and forming, in the protective film, a mask that has grooves extending along the streets, a device layer plasma etching step of, after the mask forming step is carried out, performing plasma etching on a device layer of the device wafer by device layer gas through the mask, and a base member plasma etching step of, after the device layer plasma etching step is carried out, performing plasma etching on the base member by base member gas through the mask.
Claims11
A device wafer processing method for a device wafer in which a device layer configuring devices is stacked on a base member and which has each of the devices formed in each of areas on a face side demarcated by a plurality of streets in crisscross relation, the method comprising:
- a protective film forming step of forming a protective film that covers the face side of the device wafer;
- a mask forming step of, after the protective film forming step is carried out, applying a laser beam along the streets and forming, in the protective film, a mask that has grooves extending along the streets;
- a device layer plasma etching step of, after the mask forming step is carried out, performing plasma etching on the device layer of the device wafer by device layer gas through the mask;
- and
- a base member plasma etching step of, after the device layer plasma etching step is carried out, performing plasma etching on the base member by base member gas through the mask, and
- wherein the device layer gas used during the device layer plasma etching step is different from the base member gas used during the base member plasma etching step.
A device wafer processing method for a device wafer in which a device layer configuring devices is stacked on a base member and which has each of the devices formed in each of areas on a face side demarcated by a plurality of streets in crisscross relation, the method comprising:
- a protective film forming step of forming a protective film that covers the face side of the device wafer;
- a mask forming step of, after the protective film forming step is carried out, applying a laser beam along the streets and forming, in the protective film, a mask that has grooves extending along the streets;
- a device layer plasma etching step of, after the mask forming step is carried out, performing plasma etching on the device layer of the device wafer by device layer gas through the mask;
- and
- a base member plasma etching step of, after the device layer plasma etching step is carried out, performing plasma etching on the base member by base member gas through the mask, and
- in the device layer plasma etching step, etching grooves that do not reach an upper surface of the base member are formed in the device layer, and a remaining portion of the device layer is formed on a lower side of each of the etching grooves,
- wherein the device wafer processing method further includes a laser processing step of, after the device layer plasma etching step is carried out but before the base member plasma etching step is performed, applying a laser beam to the remaining portion of the device layer and forming laser processing grooves that divide the remaining portion and that reach the base member, and
- wherein a groove width of each of the laser processing grooves is formed to be narrower than a groove width of each of the etching grooves, and a depth of each of the etching grooves is set to such a depth that debris formed in the laser processing step does not protrude from an upper surface of the device layer.
A device wafer processing method for a device wafer in which a device layer configuring devices is stacked on a base member and which has each of the devices formed in each of areas on a face side demarcated by a plurality of streets in crisscross relation, the method comprising:
- a protective film forming step of forming a protective film that covers the face side of the device wafer;
- a mask forming step of, after the protective film forming step is carried out, applying a laser beam along the streets and forming, in the protective film, a mask that has grooves extending along the streets;
- a device layer plasma etching step of, after the mask forming step is carried out, performing plasma etching on the device layer of the device wafer by device layer gas through the mask, wherein the device layer gas is received from a first etching gas supply source;
- and
- a base member plasma etching step of, after the device layer plasma etching step is carried out, performing plasma etching on the base member by base member gas through the mask, wherein the base member gas is received from a second etching gas supply source;
- wherein the first etching gas supply source is different from the second etching gas supply source.
Dependencies are inferred from the claim text.