Semiconductor device
AssigneeFuji Electric Co., Ltd.
InventorYasuyuki Hoshi
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Abstract
A semiconductor device has a semiconductor base substrate, a first electrode disposed on the surface of the semiconductor base substrate, a protective film covering an end portion of the first electrode, and a second electrode disposed on the first electrode, in an opening of the protective film. The protective film has an end portion where the protective film and the second electrode overlap. In a plan view of the semiconductor device, the end portion has a convex portion with a first radius of curvature and a concave portion with a second radius of curvature. The convex portion protrudes in a direction away from the opening, and the convex portion is recessed toward the opening. The first radius of curvature is larger than the second radius of curvature.
Claims7
A semiconductor device, comprising:
- a semiconductor base substrate;
- a first electrode disposed on a surface of the semiconductor base substrate;
- a protective film covering an end portion of the first electrode and having an opening;
- and
- a second electrode disposed on the first electrode, in the opening of the protective film, wherein
- the protective film has an end portion where the protective film and the second electrode overlap,
- in a plan view of the semiconductor device, the end portion of the protective film has a convex portion with a first radius of curvature and a concave portion with a second radius of curvature, the convex portion protruding in a direction away from the opening, the concave portion being recessed toward the opening, and
- the first radius of curvature is larger than the second radius of curvature.
Dependencies are inferred from the claim text.