Temperature sensing of regions within a superconducting integrated circuit using in-situ resonators

A system comprising:

• a superconducting integrated circuit comprising:
• a first resonator having a first resonant frequency, wherein the first resonator comprises a first inductive element and is shunted by a first capacitive element, wherein the first inductive element comprises a first meandering inductor having a first length, and wherein the first resonator has a first spatial location in relation to a floor plan of the superconducting integrated circuit;
• a second resonator having a second resonant frequency, different from the first resonant frequency, wherein the second resonator comprises a second inductive element and is shunted by a second capacitive element, wherein the second inductive element comprises a second meandering inductor having a second length, wherein the second length is selected to be different from the first length by an amount sufficient to ensure a detectable difference between the first resonant frequency and the second resonant frequency, wherein the second resonator has a second spatial location in relation to the floor plan of the superconducting integrated circuit, and wherein the second spatial location is different from the first spatial location;
• a feed line configured to provide a test signal to each of the first resonator and the second resonator in order to elicit a frequency response from the first resonator or the second resonator, wherein the first resonant frequency and the second resonant frequency, respectively, acts as a signature to correlate the frequency response with a first region within the superconducting integrated circuit corresponding to the first spatial location or with a second region within the superconducting integrated circuit corresponding to the second spatial location;
• a vector network analyzer (VNA) configured to receive signals associated with the frequency response from pads associated with the superconducting integrated circuit and to analyze any changes in the frequency response based on temperature to determine whether the first region or the second region corresponds to a hotspot region.

A system comprising:

• a superconducting integrated circuit formed within an integrated circuit chip comprising:
• a first resonator having a first resonant frequency, wherein the first resonator has a first spatial location in relation to a floor plan of the superconducting integrated circuit, wherein the first resonator is formed in a first metal layer associated with the integrated circuit chip;
• a second resonator having a second resonant frequency, different from the first resonant frequency, wherein the second resonator has a second spatial location in relation to the floor plan of the superconducting integrated circuit, and wherein the second spatial location is different from the first spatial location, and wherein the second resonator is formed in a second metal layer, different from the first metal layer, associated with the integrated circuit chip;
• and
• a feed line configured to provide a test signal to each of the first resonator and the second resonator in order to elicit a frequency response from the first resonator or the second resonator, wherein the first resonant frequency and the second resonant frequency, respectively, acts as a signature to correlate the frequency response with a first region within the superconducting integrated circuit corresponding to the first spatial location or with a second region within the superconducting integrated circuit corresponding to the second spatial location;
• a vector network analyzer (VNA) configured to receive signals associated with the frequency response from pads associated with the superconducting integrated circuit and to analyze any changes in the frequency response based on temperature to determine whether the first region or the second region corresponds to a hotspot region.