US 12,652,746 B1Granted

Magnetically enhanced VUV lamp

AssigneeUchicago Argonne, LLC

InventorsPatrick R. Stollenwerk, Kevin G. Bailey, Michael N. Bishof, Peter Mueller, Thomas O'Connor, Jake C. Zappala

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Abstract

A method and systems for enhancing the performance of vacuum ultra-violet lamps. The method includes providing a gas to a microwave cavity chamber. The microwave cavity chamber has a length along a central axis of the microwave cavity chamber, a first end along the central axis, and a second end opposite the first end along the central axis. The method further includes providing excitation energy to the microwave cavity chamber and generating a plasma in the microwave cavity chamber. A compensator magnet is disposed toward the first end of the microwave cavity chamber to provide a compensation magnetic field at the first end of the microwave cavity chamber.

Claims20

Dependent claims

A system for generating ultra-violet radiation, the system comprising:

a microwave cavity chamber having a first end and a second end, the second end opposite the first end along a central axis of the microwave cavity chamber and (i) a gas inlet port disposed toward the first end of the microwave cavity chamber, the gas inlet port configured to allow fluid flow into the microwave cavity chamber, (ii) a gas outlet port disposed toward the second end of the microwave cavity chamber, the gas outlet port configured to provide fluid flow out of the microwave cavity chamber, and (iii) an output window at the first end of the microwave cavity chamber, the output window transmits optical radiation generated in the microwave cavity chamber;
and a compensator magnet disposed proximal the first end of the microwave cavity chamber to provide an external magnetic field to the first end of the microwave cavity chamber.

Dependencies are inferred from the claim text.