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US 12,651,889 B2Granted
VCSEL with integrated ESD protection
AssigneeII-Vi Delaware, Inc.
InventorsMichael Moser, Antoine Pissis, Evgeny Zibik, Elisabetta Corti
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Abstract
A VCSEL device with a lithographic aperture and integrated electrostatic discharge event protection. The VCSEL device may comprise a plurality of layers forming a protective diode outside of the lithographic aperture area, wherein the surface area of the protective diode is larger than the surface area of said lithographic aperture.
Claims11
A VCSEL device with a lithographic aperture and electrostatic discharge event protection, the VCSEL device comprising:
- a plurality of layers forming a protective diode outside of the lithographic aperture area, wherein a surface area of said protective diode is larger than the surface area of said lithographic aperture,
- wherein said plurality of layers form an n-p-n junction to form said protective diode, and
- wherein a top n-DBR layer of said n-p-n junction over a tunnel junction is highly conductive to thermally protect the VCSEL in an electrostatic discharge event.
Dependencies are inferred from the claim text.